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problem with simulation of ultra thin silicon wafer in stand - 2 microns, trying to find max deformation

Question asked by Douglas Fleming on Dec 8, 2014
Latest reply on Jun 8, 2016 by Anna Wood

I am having a problem when trying to create a static simulation of a thin silicon wafer. The wafer thickness is two microns and i am trying to see how much it deforms under its own weight in a specific stand. i have created an assembly of the two parts but the simulation never completes and runs for hours. all i am interested in is the maximum deformation of the wafer. i am looking for this to be about 2 - 6mm which is what has been seen experimentally. i have managed to achieve a completed simulation using a larger wafer thickness in a more simplified stand but cant find a way of doing this accurately.



1 wafer cassette.JPG