AnsweredAssumed Answered

Nitrogen purge simulation help needed

Question asked by Bjorn Sorenson on May 10, 2013
Latest reply on May 14, 2013 by Jared Conway

I'm trying to simulate a load-lock for a semi-conductor type application.  I have a boat full of very thin wafers that will enter a small chamber which will then be purged with Nitrogen to remove the Oxygen content before the boat is moved into the main process chamber.  I'm running a time-dependent simulation to figure out how long it will take for the Oxygen in the small chamber to reach a certain ppm.  I'm fine with the mass fraction analysis part of it, but what I'm having trouble with is setting up a mesh that will solve in a reasonable amount of time.  My first attempt, I had a fairly loose mesh for the majority of the chamber, and a local initial mesh around the boat full of wafers with narrow channel refinement selected, but it ran overnight and didn't even finish the mesh calculation!  Any ideas?


Thanks in advance for any insights you can provide.